Title:
光源装置、照明装置、露光装置、および物品の製造方法
Document Type and Number:
Japanese Patent JP6381346
Kind Code:
B2
Inventors:
Kawashima Haruna
Application Number:
JP2014159144A
Publication Date:
August 29, 2018
Filing Date:
August 05, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; F21S2/00; G02B19/00
Domestic Patent References:
| JP2000353418A | ||||
| JP2000123611A | ||||
| JP2005032972A | ||||
| JP2012256600A | ||||
| JP9190967A | ||||
| JP2014530509A | ||||
| JP4705852B2 |
Foreign References:
| US5625738 | ||||
| US20050237764 | ||||
| EP0376398A2 |
Attorney, Agent or Firm:
Ryoichi Takaoka