Title:
超音波トランスデューサ空洞におけるゲッタリング材料の製造技術及び構造
Document Type and Number:
Japanese Patent JP7385652
Kind Code:
B2
Abstract:
A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.
Inventors:
Ryu, Jian Way
Fife, Keith, Gee.
Ruthky, Joseph
Myao, Linyun
Fife, Keith, Gee.
Ruthky, Joseph
Myao, Linyun
Application Number:
JP2021510705A
Publication Date:
November 22, 2023
Filing Date:
September 27, 2019
Export Citation:
Assignee:
Butterfly Network, Incorporated
International Classes:
H04R31/00; H04R19/00
Domestic Patent References:
| JP8330607A | ||||
| JP2011029910A |
Foreign References:
| US20170232474 | ||||
| US20130135056 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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