Title:
MAPPING MECHANISM, LOAD PORT, AND MAPPING PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2022170181
Kind Code:
A
Abstract:
To provide a mapping mechanism that can detect the environmental atmosphere (gas state) in an internal space of a transport container that does not have a purge port, and can detect the environmental atmosphere (gas state) of an internal space of a transport container that has a purge port without requiring that the gas in the transport container flows through a discharge port.SOLUTION: In a mapping mechanism M that maps information on the placement state of a plurality of objects W to be transferred in an internal space 3S of a transport container 3 that can accommodate the objects W to be transferred in multiple stages, a sensor S capable of detecting information on the environmental atmosphere in the transport container 3 is provided at a portion of the mapping mechanism M that can enter the internal space 3S of the transport container 3.SELECTED DRAWING: Figure 8
Inventors:
SUZUKI ATSUSHI
FUKAE KENICHI
FUKAE KENICHI
Application Number:
JP2021076120A
Publication Date:
November 10, 2022
Filing Date:
April 28, 2021
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD
International Classes:
H01L21/673
Attorney, Agent or Firm:
Sada Sadaya
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