Title:
MARK PRINTER
Document Type and Number:
Japanese Patent JPS5662332
Kind Code:
A
Abstract:
PURPOSE:To print a mark on a chip determined to be defective accurately and without causing damage by means of a mark printing pen having a member impregnated with a printing material and a felt tip mounted oscillably. CONSTITUTION:For example, when a chip 13 is determined to be defective in a wafer 12 on a wafer table 11, receiving an indication single from a wafer checking device, a pair of attracting magnets 20 and 20 are excited to attract an arm 14 until an open end thereof lowers (arrow A). Then, a pen tip 25 projecting from a pen body 23 mounted on an arm 14a presses against the chip 13 causing a rejection mark comprising ink to be printed thereon. At this point, the lowering level of the arm 14a and pressure working on the chip being printed can be set as desired with a stroke controlling screw 22. This enables the printing of the rejection mark without causing any mechanical damage to the chip.
Inventors:
TAKANO KAZUYUKI
Application Number:
JP13848179A
Publication Date:
May 28, 1981
Filing Date:
October 26, 1979
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/66; (IPC1-7): B41M5/00
Domestic Patent References:
| JPS5123858A | 1976-02-26 |
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