Title:
MARKING DEVICE
Document Type and Number:
Japanese Patent JP3185295
Kind Code:
B2
Abstract:
PURPOSE: To achieve marking which is suitable for analysis of a microdefective microdefective part in development and production.
CONSTITUTION: A micropart of a sample is observed by an optical microscope 2, a pulse motor 7 is driven under control of a controller 9 for allowing a ball screw rod 6 to be rotated, and a sample base 3 for mounting the sample is moved by a specified amount so that it is positioned directly below a marking needle 10. After moving the sample base 3 immediately under the marking needle 10, a pulse motor 15 is driven under control of a controller 19 for enabling a ball screw rod 14 to be rotated, thus a traveling base 12 where a needle supporting tool 11 which supports the marking needle 10 is mounted to be moved to a side of the sample base 3 and the marking needle 10 to be pressed against the sample.
Inventors:
Tsutomu Itano
Application Number:
JP33133591A
Publication Date:
July 09, 2001
Filing Date:
November 20, 1991
Export Citation:
Assignee:
NEC
International Classes:
G01N1/28; B23Q17/24; G01N21/84; G01N21/88; G01N21/956; G01Q30/08; G01Q30/20; (IPC1-7): G01N1/28; B23Q17/24; G01N21/84
Domestic Patent References:
| JP2173278A | ||||
| JP2269904A | ||||
| JP247540A | ||||
| JP6484730A |
Attorney, Agent or Firm:
▲柳▼川 信