マスクブランク及び転写用マスク

Title:

マスクブランク及び転写用マスク

Document Type and Number:

Japanese Patent JP4958200

Kind Code:

B2

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Inventors:

Hashimoto Masahiro
Atsushi Kominato
Hiroyuki Iwashita
Jun Nozawa

Application Number:

JP2011522832A

Publication Date:

June 20, 2012

Filing Date:

July 14, 2010

Export Citation:

Assignee:

HOYA CORPORATION

International Classes:

G03F1/54; G03F1/58; G03F1/68; G03F1/00

Domestic Patent References:

Attorney, Agent or Firm:

Takeshi Otsuka

Previous Patent: JPS4958199

Next Patent: JPS4958201