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Title:
マスクブランク、転写用マスクおよびこれらの製造方法
Document Type and Number:
Japanese Patent JP5530550
Kind Code:
B2
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Inventors:
Suzuki Toshiyuki
Shigenori Ishihara
Application Number:
JP2013116620A
Publication Date:
June 25, 2014
Filing Date:
June 03, 2013
Export Citation:
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Assignee:
HOYA CORPORATION
International Classes:
G03F1/26; H01L21/027
Domestic Patent References:
JP2004318184A
JP2006323236A
JP2003248291A
JP2010250344A
JP2005062894A
JP2002162726A
JP2000058543A
JP2002090978A
JP2013257544A
Attorney, Agent or Firm:
Yasuo Fujimura



 
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