MASK STAGE DRIVE MECHANISM AND ITS CONTROLLING METHOD

Title:

MASK STAGE DRIVE MECHANISM AND ITS CONTROLLING METHOD

Document Type and Number:

Japanese Patent JP3458329

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a mask stage drive mechanism which has a three-degree of freedom configuration of X, Y and θ axes, a flat structure and also the optical path with a large hole diameter at the center and which also can realize a high accurate trajectory following performance and positioning.
SOLUTION: This mechanism is provided with a fixed base plate 1 having the opening corresponding to an opening for an optical path, a θ axis movable part 4 which has an opening corresponding to the opening for the optical path and which is formed in a rotatable way around a Z axis perpendicular to X and Y axes through cross roller bearing 3 provided in the opening part of the plate 1, a Y axis movable part 7 which has an opening corresponding to the opening for the optical path and which is attached to the part 4 in a movable way in Y axial direction, and an X axis movable part 10 which has an opening corresponding to the opening for the optical path and which is attached to the part 7 in a movable way in an X axial direction. A position detector detects the positions of the respective movable parts, and the feedback control systems provided in the respective movable parts perform positional control.

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Inventors:

Masahiko Horiuchi
Yasushi Koyanagawa
Yoshiyuki Tomita

Application Number:

JP15817799A

Publication Date:

October 20, 2003

Filing Date:

June 04, 1999

Export Citation:

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Assignee:

Sumitomo Heavy Industries Ltd.

International Classes:

H01L21/68; G03F7/20; G05D3/00; G05D3/12; H01L21/027; H01L21/268; H01L21/30; (IPC1-7): G05D3/00; G05D3/12; H01L21/027; H01L21/268; H01L21/30; H01L21/68

Domestic Patent References:

JP11145049A
JP950136A
JP475113A
JP633303A
JP10202453A
JP7219636A
JP11142555A
JP10277771A
JP1131014A

Attorney, Agent or Firm:

Yosuke Goto (1 person outside)

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