Title:
MASK STORAGE CASE
Document Type and Number:
Japanese Patent JPH0324747
Kind Code:
A
Abstract:
PURPOSE: To uniformly perform packing and further easily perform packing by using an air packing which is expanded in a balloon type by blowing-in air.
CONSTITUTION: Air is blown into an air packing 15 from an air blowing-in inlet 16; the air packing 15 is expanded in a balloon type; a mask plates 14 are pressed by the air pressure, thereby performing packing. When the air in the air packing 15 is drawn out, the air is discharged from a vent 17. Thus the packing of masks contained in a mask storage case is performed by using the air packing expanded in a balloon type. Hence, even when a plurality of masks are contained, these can be uniformly fixed, and packing can be easily performed.
Inventors:
MOROZUMI YOSHINOBU
Application Number:
JP15842989A
Publication Date:
February 01, 1991
Filing Date:
June 22, 1989
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/673; G03F7/20; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Mamoru Shimizu (1 person outside)
Next Patent: JPH0324748