Title:
MASK FOR VAPOR DEPOSITION, AND ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2004043877
Kind Code:
A
Abstract:
To provide a vapor deposition mask for laminating a vapor deposition film with high accuracy without any adverse effect on a medium layer on a substrate, and an organic EL display device for depositing the vapor deposition film by using the mask.
In the vapor deposition mask 5 which is disposed on a surface to be vapor-deposited, has a plurality of mask patterns 7 in parallel along one direction, and alternately demarcates an area for vapor deposition and an area for non-vapor deposition, side surfaces of the mask patterns are inclined so that the sectional width of the mask patterns 7 is reduced from a surface opposite to a vapor deposition source 6 to a surface opposite to the surface to be vapor-deposited.
Inventors:
KAWADA ISAMU
SHIMOKAWA TOMOMI
SUZUKI SHIGEMI
SUZUKI KAZUO
YOSHIKAWA MUNETOSHI
TAKAHASHI JUNICHI
TAKAOKA TOMOSHI
SHIMOKAWA TOMOMI
SUZUKI SHIGEMI
SUZUKI KAZUO
YOSHIKAWA MUNETOSHI
TAKAHASHI JUNICHI
TAKAOKA TOMOSHI
Application Number:
JP2002202128A
Publication Date:
February 12, 2004
Filing Date:
July 11, 2002
Export Citation:
Assignee:
CANON DENSHI KK
International Classes:
C23C14/24; H01L51/50; H05B33/14; H05B33/10; (IPC1-7): C23C14/24; H05B33/10; H05B33/14
Attorney, Agent or Firm:
Keisuke Watanabe
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