To provide a metal mask member capable of stably forming evaporation patterns on a low molecular organic layer of an organic EL element and negative electrode with high precision.

The masking member is formed by fixing a plate-shaped metal mask part comprising prescribed openings corresponding to the patterns for evaporation at one side, and through holes through which, the evaporated substance passes, to a frame. The metal mask part, made of a thin metal plate, is formed by laminating a first mask part and a second mask part having through holes corresponding to patterns for evaporation, respectively. Each through holes through which, evaporated substance passes, is formed by a through hole part of the first mask part and a through hole part of the second mask part. The opening of the through hole part of the first mask part at the opposite side of the second mask part is formed into a prescribed opening corresponding to the pattern to be formed.