Title:
質量分析装置および質量分析方法
Document Type and Number:
Japanese Patent JP7280843
Kind Code:
B2
Abstract:
In a mass spectrometer, due to impurities accumulated inside a frame, a withstand voltage may decrease, and electric discharge may occur in an ion source, thereby making it impossible to perform normal measurement. Since a result of abnormality measurement due to the electric discharge cannot be distinguished from measurement abnormality caused by clogging of a tube between a pretreatment unit and a needle, there is a problem in that time is required to identify abnormal portions, and a maintenance property is lowered. As a unit for solving the problem, a return current detection unit connected in series between the frame and an ion source power supply that applies a voltage to the needle and a return current detection unit connected in series between the frame and a counter electrode power supply that applies a voltage to a counter electrode are provided. By comparing currents measured by the return current detection units with a predetermined threshold value, occurrence of the electric discharge and a portion where the electric discharge occurs are detected.
Inventors:
Takuma Nishimoto
Ong Jihao
Isao Furuya
Hiroshi Nita
Yuichiro Hashimoto
Masuyuki Sugiyama
Ong Jihao
Isao Furuya
Hiroshi Nita
Yuichiro Hashimoto
Masuyuki Sugiyama
Application Number:
JP2020016216A
Publication Date:
May 24, 2023
Filing Date:
February 03, 2020
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J49/10; G01N27/62; H01J49/26
Domestic Patent References:
| JP2001236922A | ||||
| JP2001236921A | ||||
| JP7325020A | ||||
| JP2006126217A | ||||
| JP2015534059A |
Attorney, Agent or Firm:
Patent Attorney Tsutsui International Patent Office