Title:
MASS TRANSFER METHOD FOR MICRO-OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2022182481
Kind Code:
A
Abstract:
To provide a mass transfer method for a micro-optical device excellent in laser transfer performance.SOLUTION: A mass transfer method for a micro-optical device includes: a fixed film formation step which applies onto a transparent substrate a temporary fixing composition containing a photosensitive agent having pyrolytic property and forming a temporary fixing film; a temporary fixing step which separates from a substrate for epitaxial growth at least a part of a plurality of micro-optical devices provided on the substrate for epitaxial growth and temporarily fixes it onto the temporary fixing film on the transparent substrate; and a transfer step which separates at least a part of the micro-optical device temporarily fixed on the temporary fixing film from the temporary fixing film by laser beam irradiation and transfers it onto a circuit board. Before the temporary fixing step, a pre-breeching step for thermally decomposing the photosensitive agent in the temporary fixing film is not performed.SELECTED DRAWING: Figure 1
Inventors:
TOMIYAMA EIKO
TAKAHASHI YASUNORI
TAKAHASHI YASUNORI
Application Number:
JP2021090065A
Publication Date:
December 08, 2022
Filing Date:
May 28, 2021
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
H01L21/56; C09J5/00; C09J11/06; C09J163/00; C09J171/10
Attorney, Agent or Firm:
Shinji Hayami