Title:
【発明の名称】紫外線照射方法及び装置
Document Type and Number:
Japanese Patent JP3169952
Kind Code:
B2
Inventors:
Minoru Amaya
Application Number:
JP12984090A
Publication Date:
May 28, 2001
Filing Date:
May 18, 1990
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
H01L21/67; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP63303082A | ||||
| JP63117427A | ||||
| JP239419A | ||||
| JP60172345U |