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Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2008164572
Kind Code:
A
Abstract:

To solve the problems that in the moire method of conventional technology for obtaining the contour lines from the moire pattern, it is necessary to perform complicated operations, moreover to obtain at once the contour lines of a body having level difference, errors are generated depending on the level difference.

The measurement device comprises: a light transmission part for transmitting the light in the first direction; a direction of the light converting part for converting the light to the objective direction perpendicular to the first direction; a detection part for detecting the light reflected by the object among the light converted at the converting part; and a shape measurement part for measuring the shape of the object based on the detection results of the detection part.


Inventors:
AOKI HIROSHI
Application Number:
JP2007000602A
Publication Date:
July 17, 2008
Filing Date:
January 05, 2007
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B11/24; G01B11/25
Domestic Patent References:
JPH1063846A1998-03-06
JP2003075110A2003-03-12
JP2002243420A2002-08-28
JP2005241493A2005-09-08
JPS6468606A1989-03-14
JPH02216406A1990-08-29
JPS6468606A1989-03-14
JPH05312510A1993-11-22
JP2006350078A2006-12-28
JPH07103740A1995-04-18
JP2006200908A2006-08-03
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori



 
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