To solve the problems that in the moire method of conventional technology for obtaining the contour lines from the moire pattern, it is necessary to perform complicated operations, moreover to obtain at once the contour lines of a body having level difference, errors are generated depending on the level difference.
The measurement device comprises: a light transmission part for transmitting the light in the first direction; a direction of the light converting part for converting the light to the objective direction perpendicular to the first direction; a detection part for detecting the light reflected by the object among the light converted at the converting part; and a shape measurement part for measuring the shape of the object based on the detection results of the detection part.
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Toshihide Mori