Title:
測定治具
Document Type and Number:
Japanese Patent JP6754638
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To measure the distance between a holding surface and a mounting surface on a wheel mount while setting the height from the holding surface to the mounting surface in the same state as that at the time of grinding a plate-like work piece.SOLUTION: A measuring tool (5) is for measuring the space between a holding surface (23), on which a holding table (21) holds a plate-like work piece (W), and a mounting surface (44b) of a wheel mount (44) to which a grinding wheel (46) with grinding stones (48) annularly arranged for grinding the plate-like work piece held on the holding surface is mounted with bolts. The measuring tool comprises a base (51) having a mounted surface (51a) in which female screws (51g) are formed corresponding to bolt insertion holes (44a) formed in the wheel mount, and a gauge (52) having a measuring tip (52a) disposed on the side opposite to the mounted surface. The position of the measuring tip corresponds to the position of the grinding stones, which are disposed on the grinding wheel mounted on the wheel mount, and is configured to measure along the locus of the grinding stones.SELECTED DRAWING: Figure 4
Inventors:
Kyougo Mitsuhashi
Application Number:
JP2016160595A
Publication Date:
September 16, 2020
Filing Date:
August 18, 2016
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B47/22; B24B7/04; B24B41/06; B24B49/10; H01L21/304
Domestic Patent References:
| JP2013144327A | ||||
| JP11188622A | ||||
| JP3036761U | ||||
| JP2015205351A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki