Title:
多層スタックの計測
Document Type and Number:
Japanese Patent JP7174060
Kind Code:
B2
Abstract:
Techniques for removing interferometry signal phase variations caused by distortion and other effects in a multi-layer stack include: providing an electronic processor sample interferometry data acquired for the stack using a low coherence imaging interferometry system; transforming, by the electronic processor, the sample interferometry data to a frequency domain; identifying a non-linear phase variation from the sample interferometry data in the frequency domain, in which the non-linear phase variation is a result of dispersion introduced into a measurement beam by the test sample; and removing the non-linear phase variation from the sample interferometry data thereby producing compensated interferometry data.
More Like This:
| JP3081253 | OPTICAL DETECTOR |
| WO/2002/039182 | SYSTEMS AND METHODS FOR EXPOSING SUBSTRATE PERIPHERY |
| JP2874284 | INDUSTRIAL APPLICABILITY: Interval measuring device |
Inventors:
Deck, Leslie El.
De Groot, Peter Jay.
De Groot, Peter Jay.
Application Number:
JP2020545097A
Publication Date:
November 17, 2022
Filing Date:
February 27, 2019
Export Citation:
Assignee:
ZYGO CORPORATION
International Classes:
G01B11/14; G01B9/02; G01B11/24; G01B11/26
Domestic Patent References:
| JP2011506972A | ||||
| JP20112467A | ||||
| JP2008501118A |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda
Previous Patent: Radar sensor system and method of operating radar sensor system
Next Patent: FORCE STORAGE TYPE RECOIL STARTER
Next Patent: FORCE STORAGE TYPE RECOIL STARTER