To provide a measurement technique of surface roughness, and to provide a device thereof which can be built into manufacturing lines as inspection, since a high accuracy and short time inspection is possible.
This invention provides the measurement technique of surface roughness based on the flow rate or the fluid pressure of out-flowing fluid which varies, depending on the total area of clearance gaps due to the surface roughness, when a required domain of the test surface is blocked off through pressure-welding by an aperture 2 of the hollow head 1, to which the fluid of constant pressure is supplied and the fluid outflows from the clearance gaps arisen by the surface roughness of both the outside edge of aperture of the hollow head 1 pressure-welded to the test surface and the test surface, as well as, the measuring device of surface roughness preparing a flow rate or pressure detecting mechanism 5 detecting variations of flow rate or fluid pressure of out-flowing fluid which varies, depending on the total area of clearance gaps due to the surface roughness, when a fluid supplying mechanism 3 holding inside the hollow head 1 with a constant pressure is connected to the hollow head 1 for preparing an aperture which blocks off through pressure-welding the required region of test surface and the fluid supplied to the aforementioned hollow head 1 outflows from the clearance gaps generated by the surface roughness of both the outside edge of aperture of the hollow head 1 pressure-welded to the test surface and the test surface.
SUGISAKA MASAMI
SATO MIYUKI
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Fumio Yamamoto
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