PURPOSE: To measure the diameter of laser beam with high accuracy by integrally moving an optical element and a measuring device in the direction crossing the scanning direction of laser beam at a right angle.
CONSTITUTION: When laser beam 29 is oscillated from a semiconductor laser 3 and a rotary polyhedral mirror 5 is rotated by a pulse motor, the beam 29 is converted to linear movement by the polyhedral mirror 5 to be scanned. This beam 29 is detected by photodetectors 14, 15 through Fθ lenses 7, 11 and also received by a laser beam diameter measuring device 16 and the diameter thereof is measured by the measuring device 16 to be displayed on a display device 25. The position of the laser beam 29 in an X-direction is read by a reading apparatus 18 to be displayed on a display device 26. Subsequently, a mounting table 9 is moved in a Z-direction and the lens 11, the photodetectors 14, 15 and the measuring device 16 are moved in the Z-direction and, in the same way, the beam 29 is scanned and the diameter thereof is measured. As mentioned above, the lens 11 and the measuring device 16 are freely moved up and down and the beam 29 scanned by the polyhedral mirror 25 scans the entire surface of the lens 11 and the characteristics of the lens 11 can be measured as a whole.
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KONDO YASUHIRO
DAIHISA TAKASHI
TOSHIBA INTELLIGENT TECH