MEASUREMENT DEVICE - DISCO ABRASIVE SYSTEMS LTD

Title:

MEASUREMENT DEVICE

Document Type and Number:

Japanese Patent JP2022112634

Kind Code:

A

Abstract:

To perform measurement at two or more multiple points using two or more head units without narrowing a measurement wavelength band per head unit.SOLUTION: A measurement device is provided, comprising a holding unit and a measurement unit, the measurement unit includes: a light source unit; a first optical fiber transmitting light emitted by the light source unit; a branch unit branching the light transmitted by the first optical fiber to at least two optical fibers for measurement; a plurality of head units each of which includes a flux collector collecting the light branched by the branch unit to a measurement object; a shutter unit delaying timing at which the measurement object is irradiated with light from each head unit; a second optical fiber which is branched off by the branch unit and through which return light having been reflected by the measurement object is transmitted; a spectroscopic unit having a light receiving unit receiving return light; and a control unit controlling the operation of the shutter unit, thereby controlling the timing at which the measurement object is irradiated with light from each head unit, consequently causing the light receiving unit to individually receive the return light.SELECTED DRAWING: Figure 1

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