To provide a new measuring method and a shape measuring device, which that realizes a high measuring accuracy by two points method of repetitive scanning type by using only one sensor.
A rotary section for scanning SR is relatively rotated around the periphery of a rotating guide RG, and at the same time a sensor S1 is rotated around a periphery of a measured target OB to detect irregularities of the outer periphery. As a result, an output of a displacement sensor S1 is outputted in synchronization with an encoder signal (not shown). The measured target OB and a detection section holding stand BS are rotated and displaced by a predetermined angle in a scanning direction without changing an intersecting position of an axis of rotation X. The rotary section for scanning SR is relatively rotated around the periphery of the rotary guide RG and the sensor S1 is rotated around the periphery of the measured target OB. By acquiring its output, an equation (4); m1(θ)=f(θ)+ex(θ), an equation (5); m2(θ)=f(θ+)+ex(θ), and an equation (6); m2(θ)-m1(θ)=f(θ+)-f(θ) are found, so that a difference is obtained for determining only a shape of the measured target OB.
| JP2002071336A | 2002-03-08 | |||
| JP2007178296A | 2007-07-12 | |||
| JP2002071336A | 2002-03-08 | |||
| JP2007178296A | 2007-07-12 |
Kenichi Kobayashi
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