Title:
MEASURING METHOD FOR THICKNESS OF TRANSPARENT FILM
Document Type and Number:
Japanese Patent JPS52131751
Kind Code:
A
Abstract:
PURPOSE: To simplify the measurement of the thickness of a thin film of several μm formed on a substrate made up of glass or similar substrance, by forming a metal thin layer on the film, enbedding the treated substrate in an organic high-molecule substance, thereafter grinding it.
Inventors:
MAEJIMA HIROSHI
SATOU SHIYOUICHI
SATOU SHIYOUICHI
Application Number:
JP4927376A
Publication Date:
November 04, 1977
Filing Date:
April 27, 1976
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Previous Patent: JPS52131750
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