PURPOSE: To adjust the temperature of an atmosphere to a fixed temperature, by providing a signal transmission means for transmitting a detection signal of a temperature detecting element which is provided in a glass substrate to the outside through a revolving shaft.

CONSTITUTION: At the time of processing a glass substrate 2 for master disc by rotating the revolving shaft 1, the temperature of the substrate 2 itself is detected accurately by a temperature detecting element 5 and its detected signal is transmitted the outside through a signal transmission means consisting of a brush 5 and conductive bodies 4, 4 which are formed on the revolving shaft 1 to supply the transmitted signal to a temp. controller. The temperature of the substrate can be controlled with high accuracy by supplying controlled constant temperature wind from the temperature controller to the circumference of the glass substrate for master disc.