Title:
融液導入管及びこれを用いたシリコン単結晶の製造装置
Document Type and Number:
Japanese Patent JP6597526
Kind Code:
B2
Inventors:
Hayashi Sansho
Wataru Sugimura
Down Saki Ippei
Wataru Sugimura
Down Saki Ippei
Application Number:
JP2016173700A
Publication Date:
October 30, 2019
Filing Date:
September 06, 2016
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B15/00; F27B14/16; F27D3/14
Domestic Patent References:
| JP2008195601A | ||||
| JP2000264774A | ||||
| JP2012189243A | ||||
| JP2012037167A | ||||
| JP2014512330A | ||||
| JP1148780A | ||||
| JP2010126377A |
Attorney, Agent or Firm:
Eternal patent business corporation