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Patent Searching and Data


Title:
MEMBER COVERED WITH CARBON FILM
Document Type and Number:
Japanese Patent JPH10180925
Kind Code:
A
Abstract:

To permit the formation of a protective film having electric conductivity and hydrophilic property by a method wherein a buffer layer is formed on the surface of an optical transmission member, having insulating property, while a translucent film made of carbon or the like having hydrophilic property and a specified proper resistance is provided on a silicon nitride film.

When a drum 1, in which a diamond type carbon film 45 is provided as a photoconductive body or a protective film on an OPC (organic photoconductive body) drum 1, consisting of an aluminum drum and organic resin, provided on the drum as a substrate, is formed, a plastics substrate 1 is formed of ethylene and hydrogen so as to have 0.01-0.1μm in order to improve adhesive property thereto. Then a carbon film 45, having a specific resistance of 5×1013Ω.cm or less and a thickness of 0.2-2μm, is formed as a film having hydrophilic property. In this case, a film made of a principal constituent of carbon, added with 4.5atom% of nitrogen, 10-30atom% of fluorine and hydrogen, is manufactured.


Inventors:
YAMAZAKI SHUNPEI
HAYASHI SHIGENORI
ISHIDA NORIYA
SASAKI MARI
TAKEYAMA JUNICHI
Application Number:
JP36504997A
Publication Date:
July 07, 1998
Filing Date:
December 20, 1997
Export Citation:
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Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
B32B7/02; B32B9/00; C03C17/34; C23C16/26; C23C16/27; C23C16/30; C30B29/04; (IPC1-7): B32B7/02; B32B9/00; C03C17/34; C23C16/26; C23C16/30; C30B29/04