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Title:
MEMBER FOR POLISHING AND SURFACE PLATE FOR POLISHING AND POLISHING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2000233377
Kind Code:
A
Abstract:

To make high durability and low consumption property of a polishing body compatible with high polishing speed, facilitate its incorporation into a polishing device, and reduce efficiency of waste liquid treatment, influence on the environment, and facility when the polishing body is applied to a polishing process.

A silica body which is made of silica (silicon dioxide) mainly, has bulk density of 0.2 to 1.5 g/cm3, BET specific surface area of 10 to 400 m2/g, and average particle diameter of 0.001 to 0.5 μm, and has continuous minute pores as open pores is used as a basic material. A member for polishing having solid soluble in polishing liquid in the open pore of the silica body and a surface plate for polishing and a polishing method which employ the member for polishing are used.


Inventors:
KURAMOCHI TOSHIHITO
KUBOTA YOSHITAKA
Application Number:
JP35717399A
Publication Date:
August 29, 2000
Filing Date:
December 16, 1999
Export Citation:
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Assignee:
TOSOH CORP
International Classes:
B24B37/12; B24B37/14; B24D3/00; B24D3/02; B24D99/00; C01B33/12; H01L21/304; (IPC1-7): B24D17/00; B24B37/04; B24D3/00; B24D3/02; C01B33/12