Title:
膜形成方法および膜形成装置
Document Type and Number:
Japanese Patent JP7105158
Kind Code:
B2
Abstract:
According to the present invention, a first liquid film that includes a first solvent is formed on one surface of a substrate. Then, a second liquid film that includes a second solvent that has a higher surface tension than the first solvent is formed on the first liquid film. Then, a resist liquid is supplied onto the second liquid film, and a resist film is thereby formed on the one surface of the substrate. The first solvent is propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, or a mixed solvent of propylene glycol monomethyl ether acetate and propylene glycol monomethyl ether.
Inventors:
Japanese food majestic
Kanaoka
Yoshihisa Yamada
Kanaoka
Yoshihisa Yamada
Application Number:
JP2018176390A
Publication Date:
July 22, 2022
Filing Date:
September 20, 2018
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; B05C9/06; B05C11/08; B05D1/36; B05D3/00; B05D7/24; G03F7/26
Domestic Patent References:
| JP2007324393A | ||||
| JP2013225628A | ||||
| JP2009279476A |
Foreign References:
| US20170002208 |
Attorney, Agent or Firm:
Fukushima Shoto
Masahiro Nakagawa
Hideyuki Sawamura
Masahiro Nakagawa
Hideyuki Sawamura
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