Title:
高周波数超音波に対する膜ハイドロホンおよび製造方法
Document Type and Number:
Japanese Patent JP6851368
Kind Code:
B2
Abstract:
A membrane hydrophone for analyzing high frequency ultrasound transducers has a piezoelectric membrane with electrode patterns created on the surface of the membrane. In one embodiment, the electrode patterns are doubled on each side of the membrane except for an active area of the hydrophone. In one embodiment, the electrodes are formed by removing a conductive coating on the membrane with laser pulses. The laser is set to remove the conductive coating from the piezoelectric membrane from the same side of the membrane in order to accurately align the electrodes in the active area. In one embodiment, the active area of the hydrophone has an area in a range of 900-10,000 square microns.
Inventors:
Chagall, Nicholas Christopher
Ivanitzky, Oleg
Bread, Guofen
Moszynski, Marius
Ivanitzky, Oleg
Bread, Guofen
Moszynski, Marius
Application Number:
JP2018508742A
Publication Date:
March 31, 2021
Filing Date:
August 18, 2016
Export Citation:
Assignee:
Fujifilm Sonosite Inc.
International Classes:
H04R17/00; A61B8/14; G01H11/08; H01L41/09; H01L41/113; H01L41/193; H01L41/253; H01L41/257; H01L41/29; H04R1/44; H04R31/00
Domestic Patent References:
| JP8242500A | ||||
| JP2005260208A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori