Title:
膜材料の加熱乾燥方法および装置
Document Type and Number:
Japanese Patent JP3603369
Kind Code:
B2
More Like This:
Inventors:
Komyoji Avenue
Takao Inoue
Naomi Nishiki
Junji Ikeda
Takao Inoue
Naomi Nishiki
Junji Ikeda
Application Number:
JP4844195A
Publication Date:
December 22, 2004
Filing Date:
March 08, 1995
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G02B1/10; B05C9/14; B05D3/00; C01B32/205; F26B3/20; F26B23/10; G02B1/14; H01L21/31; (IPC1-7): B05C9/14; B05D3/00; C01B31/04; F26B3/20; F26B23/10; G02B1/10; H01L21/31
Domestic Patent References:
| JP6084780A | ||||
| JP1236966A | ||||
| JP6091216A | ||||
| JP63225451A | ||||
| JP4310569A | ||||
| JP6134917A | ||||
| JP63305965A | ||||
| JP6224113A |
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito