Title:
MEMS ELEMENT, METHOD OF MANUFACTURING MEMS ELEMENT, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2015204544
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a small and highly reliable MEMS element capable of high frequency operation, in which variation of operation frequency is reduced.SOLUTION: A MEMS element 1000 has a cavity 108 formed in a substrate 100, a diaphragm 101 provided above the cavity 108, and a piezoelectric element 111 provided on the diaphragm 101. The diaphragm 101 has a lamination of at least a first thin film 102 and a second thin film 103, and the piezoelectric element 111 includes a first electrode 104, a second electrode 106, and a piezoelectric material 105 sandwiched by the first electrode 104 and second electrode 106. Consequently, a highly reliable MEMS element capable of high frequency operation, in which variation of operation frequency is reduced, can be achieved.
More Like This:
| WO/2018/061302 | PIEZOELECTRIC SOUND GENERATING COMPONENT AND METHOD FOR MANUFACTURING SAME |
| WO/2006/005938 | PORTABLE SPEAKER SYSTEM |
Inventors:
MIYASHITA KAZUYUKI
Application Number:
JP2014083400A
Publication Date:
November 16, 2015
Filing Date:
April 15, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H04R17/00; A61B8/00; B81B3/00; B81C1/00; H01L41/113; H01L41/31; H03H3/02; H03H9/17; H04R31/00
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe
Previous Patent: IMPEDANCE ADJUSTING SYSTEM AND IMPEDANCE ADJUSTING METHOD
Next Patent: IMAGE FORMING APPARATUS
Next Patent: IMAGE FORMING APPARATUS