Title:
MEMS ELEMENT AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2016007681
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an MEMS element of which a capacity of a buck chamber can be increased without an additional manufacturing process.SOLUTION: In an MEMS element, a buck chamber 11, in which a substrate is so removed that a movable electrode 3 is exposed on the substrate side, is formed, an electrode support part 14 comprising the substrate on which the movable electrode 3, a spacer 4 and a stationery electrode are laminated is formed outside the first buck chamber, and further, a second buck chamber 12 in which the substrate is removed is formed outside the electrode support part. Communication parts are so formed on the first buck chamber 11 and the second buck chamber 12 that respective spaces are communicated with each other. The first buck chamber 11 and the second buck chamber 12 can be formed similarly to a general buck chamber.
Inventors:
OKADA HIROKI
Application Number:
JP2014130855A
Publication Date:
January 18, 2016
Filing Date:
June 26, 2014
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
B81B3/00; B81C1/00; H04R19/04; H04R31/00
Domestic Patent References:
| JP2008028512A | 2008-02-07 | |||
| JP2007243768A | 2007-09-20 |