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Title:
MEMS ELEMENT, OPTICAL MEMS ELEMENT, DIFFRACTION TYPE OPTICAL MEMS ELEMENT AND LASER DISPLAY
Document Type and Number:
Japanese Patent JP2005279831
Kind Code:
A
Abstract:

To reduce deflection of a beam due to internal stress of a laminated film in an electrostatic drive type MEMS element such as an optical MEMS element.

This MEMS element has a beam 36 formed of a multi-layer, and a stress balance adjusting layer 41 for restraining the deflection of the beam 36 is formed in the multi-layer.


Inventors:
SARUTA NORIHIKO
KINOSHITA TAKASHI
KASAI HIROTO
Application Number:
JP2004095872A
Publication Date:
October 13, 2005
Filing Date:
March 29, 2004
Export Citation:
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Assignee:
SONY CORP
International Classes:
G02B26/08; B81B3/00; (IPC1-7): B81B3/00; G02B26/08
Domestic Patent References:
JP2002237245A2002-08-23
JPH1172724A1999-03-16
JP2002113866A2002-04-16
JP2003311692A2003-11-05
JPH06241781A1994-09-02
JPH05325274A1993-12-10
JP2003513411A2003-04-08
JP2003021798A2003-01-24
JP2002267996A2002-09-18
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hironobu Isoyama



 
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