Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MEMS MICROPHONE MODULE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2012114672
Kind Code:
A
Abstract:

To provide a MEMS microphone module which can sufficiently absorb a stress and have excellent sensitivity even when a nozzle having a small internal diameter is used or adhesive bond having low viscosity is used to prevent the nozzle from being clogged.

A MEMS microphone module 100 comprises: a substrate 110; a MEMS microphone element 120; and an adhesive 130 which bonds the substrate 110 to the MEMS microphone element 120. The MEMS microphone element 120 comprises: a first principal surface; a second principal surface which is opposite to the first principal surface; a pedestal 121 through which an open hole 124 penetrating from the first principal surface to the second principal surface is formed; and a diaphragm 122 which is formed on the first principal surface of the pedestal 121 and covers a part of the open hole 124. The adhesive 130 bonds the second principal surface of the pedestal 121 to the substrate 110, and covers a part of a side face of the pedestal 121, and at least one recess part 125 is formed at a surface boundary with the adhesive 130 on the second principal surface of the pedestal 121.


Inventors:
INOUE DAISUKE
TOMITA YOSHIHIRO
Application Number:
JP2010261855A
Publication Date:
June 14, 2012
Filing Date:
November 24, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PANASONIC CORP
International Classes:
H04R19/04; B81B3/00; B81C3/00; H04R31/00
Attorney, Agent or Firm:
Hiromori Arai