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Title:
MEMS SWITCH
Document Type and Number:
Japanese Patent JP2009134993
Kind Code:
A
Abstract:

To provide an MEMS switch in which downsizing is achieved and on/off of an electric current of a large capacity can be carried out surely.

A silicon substrate 1 has a support part 2, and one end of a plate-like magnetic body 3 is fixed to the support body 2. A first contact 4A is installed inside the other end of the magnetic body 3 via an insulating layer 3a, and a second contact 4B is installed on the silicon substrate 1 opposed to the first contact 4A. Furthermore, a first electrode 6A is installed inside the magnetic body 3 via the insulating layer 3a, and a second electrode 6B is installed on the silicon substrate 1 opposed to the first electrode 6A. When a magnet 11 moves from A position to B position, the magnetic body 3 is attracted by its magnetic force, and furthermore, since electrostatic attractive force is generated in the magnetic body 3 by a direct current power supply (+B) applied to the first and second electrodes 6A, 6B, the first and second contacts 4A, 4B are surely switched on.


Inventors:
TANIGUCHI MASAHIRO
KANAMARU KENJI
Application Number:
JP2007310204A
Publication Date:
June 18, 2009
Filing Date:
November 30, 2007
Export Citation:
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Assignee:
TOKAI RIKA CO LTD
International Classes:
H01H59/00; B81B3/00; H01H57/00
Attorney, Agent or Firm:
Tadao Hirata



 
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