To provide an MEMS switch which reduces a parasitic capacitance between a movable contact and both of stationary contacts.
The MEMS switch includes a base board 1, a pair of signal lines 34, 34 which are formed on the one surface side of the base board 1 in a thickness direction and have stationary contacts 35, 35, and a movable plate portion 21 having a movable contact of which the one end portion is fixed on the one surface side of the base board 1 and of which the other end portion includes a movable contact 25 which attaches and detaches with the stationary contacts 35, 35. The movable plate portion 21 is formed in a curved convex shape in an opposite side to a side of the base board 1 so that the movable contact 25 and both of the stationary contacts 35, 35 do not lap on each other in a thickness direction and that a distance between the movable contact 25 and both of the stationary contacts 35, 35 is in a specified distance, and a part other than a post portion 22 in the movable plate portion 21 composes a spring portion 26. A driving means is composed of a piezo-electric driven actuator 4 and an electrostatic driven actuator 5, and the movable contact 25 is attached and detached with both of the stationary contacts 35, 35 by deforming the spring portion 26 of the movable plate portion 21.
YOSHIHARA TAKAAKI
SHIRAI TAKEO
MATSUSHIMA CHOMEI
KAWADA HIROSHI
HAGIWARA YOSUKE
Atsuo Mori