Title:
MEMS TRANSDUCER DEVICE AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2019145934
Kind Code:
A
Abstract:
To provide an MEMS transducer device having waterproof dustproof characteristics and electromagnetic shielding effect while securing passage characteristics of an input signal, and a method for manufacturing the same.SOLUTION: In an MEMS transducer device, an MEMS transducer 14 for converting an acoustic signal into an electric signal and an integrated circuit 15 for performing signal processing including amplification are implemented on a substrate 10a in a cavity 12, and the cavity 12 is covered with a lid body 18. A part or all of the lid body 18 is formed of an exterior film obtained by adding a conductive mesh 20 to a sound-permeable waterproof film 19 made of a porous thin film having sound-permeable waterproof characteristics by Ag paste or the like which shields electromagnetic waves. The conductive mesh 20 provides a finer mesh for a region 20a directly above the MEMS transducer 14 than for the other region 20b.SELECTED DRAWING: Figure 1
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Inventors:
KOUCHI HIROYUKI
MASUMOTO NAOMI
OGATA TOSHIHIRO
FUJII YOSHIO
YAMAZAKI KIMIYOSHI
MASUMOTO NAOMI
OGATA TOSHIHIRO
FUJII YOSHIO
YAMAZAKI KIMIYOSHI
Application Number:
JP2018026718A
Publication Date:
August 29, 2019
Filing Date:
February 19, 2018
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
H04R1/00; B81B7/02; H04R19/00; H04R19/04; H04R31/00; H05K9/00
Domestic Patent References:
| JP2009044600A | 2009-02-26 | |||
| JP2010521861A | 2010-06-24 | |||
| JP2015530030A | 2015-10-08 | |||
| JP2004087953A | 2004-03-18 | |||
| JP2008271425A | 2008-11-06 |
Attorney, Agent or Firm:
Yasuto Ogata