To provide an MEMS tunable capacitor which hardly varies the distance between a movable electrode and a fixed electrode even when a voltage is applied.
A device 10 comprises a signal line 12 formed on a surface P of a substrate, two or more pairs of columnar anchors 20 stood across the signal line, plate-like fixed electrodes 14 stood across the signal line 12, and the plate-like movable electrode 16 suspended in the space above the signal line 12 with springs 18 extended from the anchors 20 to be sandwiched between the fixed electrodes 14. The anchors 20 are fixed outside the fixed electrodes 14 near both lengthwise ends of the signal line 12, and the springs 18 are provided at a tip part to straddle the signal line 12. The pair of springs 18, extending from the pairs of anchors 20 while straddling the signal line 12, suspend the movable electrode 16 provided along the length of the signal line 12 in the space above the signal line 12, and the movable electrode 16 is situated between the fixed electrodes 14 in parallel therewith.
| JP2015050325 | DIGITAL VARIABLE CAPACITANCE MEMS DEVICE |
| JPH11511291A | 1999-09-28 | |||
| JP2006518926A | 2006-08-17 |
| US20080253057A1 | 2008-10-16 | |||
| WO2005117051A1 | 2005-12-08 |
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda