To make it possible to detect a particle velocity of medium which propagates sound wave over the frequency band wider than before, and to provide a MEMS type thermal beam type particle velocity detection element which can secure design flexibility of detection element distance, and miniaturization of the device, and to provide its manufacturing method and an acoustic sensor.
The MEMS type thermal beam type particle velocity detection element 10 comprises a silicon substrate 11, insulation films 12, 13, an electrode pad 14, particle velocity detection parts 15 to 17. The silicon substrate 11 has four convex parts of height dimension L and one concave part 11a for passing the sound wave. The particle velocity detection parts 15 to 17 are fabricated by FIB-CVD method, respectively, and consist only of resistance body of pair formed by becoming independent so that it might be bridged between each convex part. The resistance bodies of pair have a configuration put in order and prepared in the directions which intersect perpendicularly with X-axis, Y-axis, and Z-axis, respectively.
TAJIMA TOSHIFUMI
GOTO MASAHIDE
SUGIMOTO TAKEHIRO
| JP2002296291A | 2002-10-09 | |||
| JP2003532881A | 2003-11-05 |
| WO2004077536A1 | 2004-09-10 |
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