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Title:
MEMS VIBRATING BEAM ACCELEROMETER WITH BUILT-IN TEST ACTUATORS
Document Type and Number:
Japanese Patent JP2022089789
Kind Code:
A
Abstract:
To provide a MEMS vibrating beam accelerometer with built-in test actuators, and a method of testing the same.SOLUTION: Resonators 18A, 18B are excited at respective resonant frequencies. In the presence of external acceleration, a proof mass 12 applies axial force to resonator beams 19A, 19B of the resonators 18A, 18B. The axial force from the proof mass 12 causes change in the driven resonant frequency such that the frequency change may be used to measure external acceleration on the MEMS vibrating beam accelerometer 10.SELECTED DRAWING: Figure 1

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Inventors:
JOHN REINKE
Application Number:
JP2021196568A
Publication Date:
June 16, 2022
Filing Date:
December 03, 2021
Export Citation:
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Assignee:
HONEYWELL INT INC
International Classes:
G01P15/097; G01P15/08; G01P15/13; G01P21/00
Attorney, Agent or Firm:
Osamu Yamamoto
Toru Miyamae
Junichi Matsuo
Kenichi Torii



 
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