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Title:
MESO STRUCTURE MEMBRANE, MESOPOROUS MATERIAL MEMBRANE AND ITS PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP2005246369
Kind Code:
A
Abstract:

To provide a meso structure membrane having a structure that surfactant molecular assemblies are regularly arranged in three dimensions.

A polymeric compound membrane is formed on the surface of a substrate with a spin-coat method or the like. A rotating roller around which a cloth is twisted is pressed against the membrane so that the membrane is rubbed with the rotating roller in one direction. Polymeric materials comprise polyimide, polyamide, polystyrene or the like. The substrate comprises quartz glass, a silicon substrate or the like. The mesostructure membrane can be formed by holding the substrate in a water solution containing a surfactant, silicon alkoxide, and an acid. While the substrate is held in the water solution, the reaction is carried out at temperatures around 60-120°C for several hours or several days. The surfactant comprises C18H37(OCH2CH2)20OH, C16H33(OCH2CH2)20OH or the like. The alkoxide comprises tetraethoxysilane, tetramethoxysilane, tetrapropoxysilane, or the like. Hydrogen chloride, nitric acid, sulfuric acid, or the like is used as a catalyst.


Inventors:
KAWASHIMA YASUHIRO
MIYATA HIROKATSU
KURODA KAZUYUKI
Application Number:
JP2004228084A
Publication Date:
September 15, 2005
Filing Date:
August 04, 2004
Export Citation:
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Assignee:
CANON KK
International Classes:
B82B1/00; B01J19/00; B82B3/00; C01B37/00; (IPC1-7): B01J19/00; B82B1/00; B82B3/00; C01B37/00
Attorney, Agent or Firm:
Jyohei Yamashita
Hiroshi Shimura
Michio Nagai