Title:
ハードマスクおよび充填材料として安定な金属化合物、その組成物、およびその使用方法
Document Type and Number:
Japanese Patent JP6786391
Kind Code:
B2
Abstract:
The present invention relates to novel, soluble, multi-ligand-substituted metal oxide compounds to form metal oxide films with improved stability as well as compositions made from them and methods of their use. Specifically, the invention pertains to compounds having the following structure (I) wherein M is a metal and n is 1 to 20, and wherein at least one of R1, R2, R3, and R4 is i) and at least at least one of R1, R2, R3, and R4 is ii), where i) is a silicon bearing organic moiety having at least 2 carbons, and ii) is an organic moiety. The invention also relates to spin-coatable compositions of compounds of structure (I) dissolved into a solvent. The present invention further relates to processes using this spin coatable composition to form a coating on a patterned substrate.
Inventors:
Yao Falon
Murren Seilem Kay
Wolfer Elizabeth
Mackenzie Douglas
Jo Jun Young
Padmanavan Munirasna
Murren Seilem Kay
Wolfer Elizabeth
Mackenzie Douglas
Jo Jun Young
Padmanavan Munirasna
Application Number:
JP2016537231A
Publication Date:
November 18, 2020
Filing Date:
August 20, 2014
Export Citation:
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung
International Classes:
C08G79/00; C07F7/08; C07F7/28; C08L85/00; H01L21/027
Domestic Patent References:
| JP62285924A | ||||
| JP2016508963A |
Foreign References:
| US5563228 | ||||
| US20140159278 | ||||
| WO2010047109A1 | ||||
| US3035071 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Katsunori Uenishi
Ichiro Torayama
Blacksmith
Katsunori Uenishi
Ichiro Torayama
Previous Patent: コンタミネーションフリー試薬を使用したエンドヌクレアーゼ支援等温増...
Next Patent: ＦｃＲｎ結合特性が改変され、プロテインＡ結合特性が保持されているＦ...
Next Patent: ＦｃＲｎ結合特性が改変され、プロテインＡ結合特性が保持されているＦ...