Title:
METAL MASK AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS5517526
Kind Code:
A
Abstract:
PURPOSE: For improving metallic mask in strength and sizing accuracy, to crystallize a given portion of non-crystalline metal with electronic or laser beam and to etch said portion.
CONSTITUTION: A crystalline section 1 is made by applying electronic or laser beam in place of photo resist on a given portion of non-crystalline metallic plate 2. Said crystalline section 1 is almost vertical in thinkness direction and considerably higher than non-crystalline section 2 in corrosion resistance. When etching is made in the next process, therefore, no lateral etching takes place so that openings can be made precisely. Thus-manufactured metallic mask is offered for metallic deposition.
Inventors:
ISHIHARA JIYOU
AI MITSUO
IKUTA ISAO
SUZUKI HIDEO
NAGAI SHIYOUICHI
AI MITSUO
IKUTA ISAO
SUZUKI HIDEO
NAGAI SHIYOUICHI
Application Number:
JP9043578A
Publication Date:
February 07, 1980
Filing Date:
July 26, 1978
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H05K3/14; B41C1/14; B41N1/24; (IPC1-7): B41C1/14; B41N1/24; H05K3/14