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Patent Searching and Data


Title:
メタルマスク
Document Type and Number:
Japanese Patent JP7175354
Kind Code:
B2
Abstract:
To provide a metal mask capable of accurately forming an object at a predetermined position on a workpiece.SOLUTION: In a metal mask provided with a through hole 12 corresponding to a predetermined pattern, the through hole 12 includes an introduction hole portion 15 that opens in a surface of a mask body 10, and a holding hole portion 16 provided on the lower side of the introduction hole portion 15, and height dimensions of the holding hole portion 16 on one side edge and the other side edge thereof are set to heights different from each other and in a cross-sectional view in a thickness direction of the mask body 10, an inner surface of one side edge of the introduction hole portion 15 faces the inner surface of the other side edge of the holding hole portion 16.SELECTED DRAWING: Figure 6

Inventors:
Kiichiro Ishikawa
Yoshihiro Kobayashi
Application Number:
JP2021123929A
Publication Date:
November 18, 2022
Filing Date:
July 29, 2021
Export Citation:
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Assignee:
Maxell Co., Ltd.
International Classes:
H01L21/60
Domestic Patent References:
JP2006147697A
JP9262722A
JP2002164369A