To produce dense patterned metal oxide film almost free form an impurity phase by depositing powder as a 1st material by electrophoresis on the patterned electrode part of a substrate, sticking a 2nd material to the remaining part and carrying out pressing and sintering by heating.

Powder of alkoxides, acetates, chlorides, oxides, etc., of metals such as Pb, La, Zr and Ti produced by heating and drying a soln. prepd. by a sol-gel method is electrodeposited as a 1st material by electrophoresis on the patterned face 2 of an electrode 1 made of a substrate 4 with a pectinately patterned Pt electrode 2. Powder contg. Pb is then stuck as a 2nd material to the remaining part. The substrate 4 is pressed and sintering and oxidation are carried out by heating in air to produce the objective dense nonporous patterned metal oxide film almost free from an impurity phase. The metal oxide is, e.g. (Pb, La) (Zr, Ti)O3.