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Patent Searching and Data


Title:
METAL PATTERN MATERIAL AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2012234013
Kind Code:
A
Abstract:

To provide a metallic pattern material capable of forming a metallic pattern of thin lines or small dots with high resolution after plating, and to provide a manufacturing method of the metallic pattern material.

The manufacturing method of a metallic pattern material comprises the steps of: exposing a specified light sensitive material for plating formation in exposure at a pitch of 6 μm or less with a laser power of 100% or less and [(pitch (μm)×75/6+25)-30]-[(pitch (μm)×75/6+25)+15]% to optimal power at the time of exposure at 6 μm pitch; developing the light sensitive material for plating formation after exposure with a developer; and plating the light sensitive material for plating formation with a pattern formed after development at a plating bath ratio of 10 or less.


Inventors:
USAMI YOSHIHISA
KONO TAKATSUGU
Application Number:
JP2011101771A
Publication Date:
November 29, 2012
Filing Date:
April 28, 2011
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
G03F7/038; C08F220/20; C23C18/20; C25D5/56; C25D7/00; G03F7/028; G03F7/40; H01L21/288
Attorney, Agent or Firm:
Koichi Hirota
Yoshihiro Nagare
Naoko Matsuda