Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ウェーハ研磨加工液中の金属除去方法および装置
Document Type and Number:
Japanese Patent JP5691179
Kind Code:
B2
More Like This:
JP5250405Waste liquid treatment equipment
JP2002212545CMP ABRASIVE AND METHOD FOR PRODUCING THE SAME
JP4612600Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk
Inventors:
Yoshinobu Nishimura
Setoguchi Susumu
Application Number:
JP2010012422A
Publication Date:
April 01, 2015
Filing Date:
January 22, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Sumco inc.
International Classes:
B24B57/02; B24B37/00; H01L21/304
Domestic Patent References:
JP2004084287A1
JP2003010614A
JP2007090243A
JP2008036525A
JP2007319974A
JP200686144A
JP200170969A
Attorney, Agent or Firm:
Ascend Patent Business Corporation



 
Previous Patent: 分注方法及び分注装置

Next Patent: MOVING TYPE HEAT TREATMENT FURNACE GAS FEEDER