Title:
METAL WIRING AND CAPACITOR STRUCTURE USING METAL WIRING AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP2783147
Kind Code:
B2
Abstract:
PURPOSE: To provide a highly reliable ferroelectric capacitor by preven-ting the formation of a large step difference when a metal wiring is made thick in order to avoid the generation of the high resistance of the metal electrode wiring layer of the ferroelectric capacitor caused by the reduction of the area of a memory cell accompanied by the high-density integration of the memory in a ferroelectric memory.
CONSTITUTION: A metallic ground electrode wiring 2 is embedded in a layer insulating film 6 having the flat surface, which is formed on a semiconductor substrate. A metal film 3, a ferroelectric film 4 and an upper metal wiring 5 are formed at the upper part of a structure, where the upper layer of the metallic ground wiring layer appears. The structure of the ferroelectric capacitor such as this is obtained.
Inventors:
TANABE NOBUHIRO
HAYASHI YOSHIHIRO
KUNIO TAKEMITSU
MATSUKI TAKEO
HAYASHI YOSHIHIRO
KUNIO TAKEMITSU
MATSUKI TAKEO
Application Number:
JP568194A
Publication Date:
August 06, 1998
Filing Date:
January 24, 1994
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L27/04; H01L21/822; H01L21/8247; H01L27/10; H01L29/788; H01L29/792; (IPC1-7): H01L27/04; H01L21/822; H01L21/8247; H01L27/10; H01L29/788; H01L29/792
Domestic Patent References:
| JP5110110A | ||||
| JP5343612A | ||||
| JP294559A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
Previous Patent: REAR SURFACE COOLER FOR STEEL SHEET
Next Patent: STEEL PLATE WITH PROJECTIONS AND MANUFACTURE THEREOF
Next Patent: STEEL PLATE WITH PROJECTIONS AND MANUFACTURE THEREOF