Title:
METAL WIRING FILM FOR DISPLAY UNIT
Document Type and Number:
Japanese Patent JP2012109465
Kind Code:
A
Abstract:
To provide a metal wiring film for a display unit capable of ensuring an electric contact having a low resistance ohmic characteristic even if a barrier metal layer between a Si semiconductor layer and/or a transparent conductive film is omitted, and having sufficient heat resistance.
The metal wiring film for the display unit is a laminated film comprising: an Al alloy film 53 having more than 20 at.% of Mo and more than 5 at.% of at least one element selected from a group consisting of Si, Nd, Ni, Mn, Mg, Fe and Zn; and a pure Cu or a Cu alloy film 28, 29, and the Al alloy film is directly connected to a semiconductor layer 33 and the Cu or the Cu alloy film is directly connected to the transparent conductive film 55.
Inventors:
TSUJI TOSHIYUKI
KUGIMIYA TOSHIHIRO
MIKI AYA
OKUNO HIROYUKI
MORITA SHINYA
KUGIMIYA TOSHIHIRO
MIKI AYA
OKUNO HIROYUKI
MORITA SHINYA
Application Number:
JP2010258278A
Publication Date:
June 07, 2012
Filing Date:
November 18, 2010
Export Citation:
Assignee:
KOBE STEEL LTD
International Classes:
H01L29/786; G09F9/30; H01L21/28; H01L21/285; H01L21/3205; H01L21/336; H01L21/768; H01L23/532
Attorney, Agent or Firm:
Kyuichi Ueki
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Akemi Takeoka
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Akemi Takeoka