Title:
集積光学部品用の三次元構造重合体層の製造方法
Document Type and Number:
Japanese Patent JP4002606
Kind Code:
B2
Abstract:
A process for the fabrication of polymer layers structured in three dimensions, such as of lenses, which are applied to the end of optical fibers or of laser light sources. Dry resist that is polymerizable through exposure is used as a base substance. The dry resist is applied to a substrate and is exposed with a dose apportionment that is predefined as a function of space and time in a structure region. The structure region is precalculated with submicrometer precision using image-processing methods and exhibits the form of the desired lens. The lens-shaped structure region that is polymerized through exposure is removed from the unexposed dry resist. The process of the present invention makes it possible to place lenses on an optical fiber or a laser with submicrometer precision.
Inventors:
Coups, Hans, W., Pea.
Babine, Sergie
Babine, Sergie
Application Number:
JP50970397A
Publication Date:
November 07, 2007
Filing Date:
August 24, 1996
Export Citation:
Assignee:
Navotech Game Beher
International Classes:
B29C67/00; G02B3/00; G02B6/122; G02B6/25; G02B6/42; G03F7/075; G03F7/20; G03F7/36; B29L11/00
Domestic Patent References:
| JP4022959A | ||||
| JP4136160A | ||||
| JP5100425A | ||||
| JP5333232A | ||||
| JP58005735A | ||||
| JP62280840A | ||||
| JP7106224A | ||||
| JP1224708A | ||||
| JP3046664A | ||||
| JP2099955A | ||||
| JP54105559A |
Attorney, Agent or Firm:
Masatake Shiga