Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
導電性マイエナイト型化合物の製造方法
Document Type and Number:
Japanese Patent JP5347345
Kind Code:
B2
Abstract:

To provide a high efficiency manufacturing method of a mayenite type compound having ≥1×1015cm-3electron density and high secondary electron emission coefficient.

The manufacturing method of the conductive mayenite type compound is characterized by treating a mayenite type compound with plasma generated from a rare gas. A power source of the plasma generation is preferably AC of RF frequency, VHF frequency or microwave frequency. The electron density of the resultant conductive mayenite type compound is preferably ≥1×1015cm-3.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Webster Akatsuki
Setsuro Ito
Suzuki Susumu
Application Number:
JP2008156733A
Publication Date:
November 20, 2013
Filing Date:
June 16, 2008
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Asahi Glass Co., Ltd.
International Classes:
C01F7/02; C04B35/44; H01B1/08; H01B13/00; H01J9/02; H01J11/22; H01J11/34; H01J11/40
Domestic Patent References:
JP2005505130A
JP7258845A
JP10150031A
JP2002003218A
JP2005314196A
JP2006224038A
JP2006502593A
Foreign References:
WO2006129675A1
WO2005000741A1
WO2005077859A1
WO2007060890A1
WO2008023673A1
Other References:
ウエブスター暁 ほか,12CaO・7Al2O3エレクトライドの二次電子放出特性,日本化学会第87春季年会講演予稿集I,2007年 3月12日,第85ページ右下欄